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 Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS 398 Ruoshui Road, SEID, SIP, Suzhou, 215123, China phone: +86-512-62872509 email: jgpt@sinano.ac.cn www.sinano.ac.cn Booth 33 SINANO’s research focuses on science and technology related to information, energy, life sciences and the environment. The institute comprises eight independent research departments. To date, seven of the institute’s laboratories have become key laboratories of Suzhou City, one has become a CAS key laboratory and one has been jointly established by the Ministry of Science and Technology and the government of Jiangsu Province. SINANO researchers have so far published over 1200 SCI articles in high impact international journals, including Advanced Materials, Journal of the American Chemical Society, Nano Letters and ACS Nano, etc. In order to serve the academic research community and local industry, SINANO has established two open facilities, namely the Micro/nanofabrication Facility (NFF) and the Public Platform for Characterization and Testing. These two facilities have been open to the public since 2009. NFF has over 5,500 square meters of clean rooms with facilities to conduct many micro/nano processes, such as 1) photolithography and electron beam lithography;2) thin film deposition of metals, alloys and ceramic compounds;3) annealing, oxidation, and doping;4) wet etching and reactive ion etching; and 5) packaging and characterization. Much of the equipment is capable of processing on a broad range of substrates such as semiconductors, glass, ceramics and plastics with sizes from small pieces to 6-inch wafers. The Public Platform for Characterization and Testing comprisean electron microscopy lab, optical spectroscopy lab, opto-electronics lab, scanning probe microscopy lab, and computing center, all of which have state-of-the-art equipment for structural, electrical and optical property analysis. |