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scia Systems GmbH
Annaberger Straße 240, 09125 Chemnitz, Germany
phone: +49 (0)371 5347 663
fax: +49 (0)371 5347 781
email: info@scia-systems.com

Booth 51

scia Systems manufactures advanced ion beam and plasma processing equipment for deposition, etching, trimming and structuring of thin films and surfaces. The systems are used for the production of microelectronics, MEMS and precision optical components, in both high volume production as well as in research and development environments. scia Systems provides highly reliable tools together with a superior technology support. The tools are flexible and modular in design. Several vacuum process chambers can be combined into cluster or in-line solutions, according to customer-specific requirements.