Sponsors/ExhibitsCurrent Support Booth Availability Sponsor/Exhibit Brochure |
FemtoTools AG Furbachstrasse 4 Buchs, 8107 SWITZERLAND phone: +41-44-844-4425 fax: +41-44-844-4427 email: info@femtotools.com www.femtotools.com Booth 30 32 FemtoTools presents the world's first MEMS Probestation for the combined mechanical and electrical testing of microfabricated sensors and actuators. This system combines the features of an electrical probe station, a measurement microscope, a mechanical testing instrument and a variety of power sources, an oscilloscope and a LCR-meter. The combination of these instruments allows for the direct, wafer-level testing of various MEMS-based devices, without the need to develop dedicated readout electronics and testing software. |